Introduction to Microsystem Design

Introduction to Microsystem Design

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This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.This is the so-called squeeze film effect which is well known from the difficulty to lift the lid of a pot lying on a flat surface, e.g., the kitchen desk. This effect is also one of the reasons why a rotating coin needs such a long time to fall down onto a anbsp;...


Title:Introduction to Microsystem Design
Author: Werner Karl Schomburg
Publisher:Springer - 2015-06-25
ISBN-13:

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